3D Measurement

NS-3800

For high resolution optical 3D measurement

제품소개
Model Microsope NS-3800 Remark
Controller NS-3800E
Objective lens magnification 10× 20× 50× 100× 150×
Observation /
Measuring range
Horizontal (H): μm 1400 700 280 140 93
Vertical (V): μm 1050 525 210 105 70
Working distance: mm 16.5 3.1 0.54 0.3 0.2
Numerical aperture (N.A.) 0.30 0.46 0.80 0.95 0.95
Optical zoom ×1 to ×6
Total magnification 178× to 26700×
Optical system for observation / measurement Pinhole confocal optical system
Height measurement Measuring scan range Fine scan : 100 μm (and/or) Long scan : 7 mm [NS-3800-L] Note 1
Fine scan : 400 μm (and/or) Long scan : 10 mm [NS-3800-D
Fine scan : 200 μm (or) Long scan : 10 mm [NS-3800-T]
Display resolution 0.001 μm
Repeatability σ 0.010 μm Note 2
Width measurement Display resolution 0.001 μm
Repeatability 3σ 0.02 μm Note 3
Frame memory Pixel count 1024×768, 1024×384, 1024×192, 1024×96
For confocal image 12 bit
For color image 8-bit for RGB each
For height measurement 16 bit
Frame rate Surface scan 20 Hz to 160 Hz
Line scan ~8 kHz
Auto function Auto focus
Laser beam light source for
confocal measurement
Wavelength Violet laser, 405 nm
Output ~2 mW
Laser Class Class 3b
Laser light-receiving element PMT (photomultiplier tube)
Data processing unit Dedicated PC
Power supply Power-supply voltage 100 to 240 VAC, 50/60 Hz
Current consumption 500 VA max.
Weight Microscope Approx. ~ 8 kg
Controller ~8 kg
  • Note 1 :

    Fine scan is performed by piezoelectric actuator (PZT).
    Dual scan mode by fine and long scanner is available only for single lens type.

  • Note 2 :

    100 times measurement of standard sample (1μm step height) with 100× / 0.95 objective.

  • Note 3 :

    100 times measurement of standard sample (5μm pitch) with 100× / 0.95 objective.

Head
Dimensions