나노스코프시스템즈

KOR

3D Measurement

NS-3500

For high resolution optical 3D measurement

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제품사양

Model	Microsope	NS-3500					Remark
Model	Controller	NS-3500E					Remark
Objective lens magnification		10×	20×	50×	100×	150×
Observation / Measuring range	Horizontal (H): μm	1400	700	280	140	93
Vertical (V): μm		1050	525	210	105	70
Working distance: mm		16.5	3.1	0.54	0.3	0.2
Numerical aperture (N.A.)		0.30	0.46	0.80	0.95	0.95
Optical zoom		×1 to ×6
Total magnification		178× to 26700×
Optical system for observation / measurement		Pinhole confocal optical system
Height measurement	Measuring scan range	Fine scan : 100 μm (and/or) Long scan : 7 mm [NS-3800-L]					Note 1
		Fine scan : 400 μm (and/or) Long scan : 10 mm [NS-3800-D
		Fine scan : 200 μm (or) Long scan : 10 mm [NS-3800-T]
	Display resolution	0.001 μm
	Repeatability σ	0.010 μm					Note 2
Width measurement	Display resolution	0.001 μm
Width measurement	Repeatability 3σ	0.02 μm					Note 3
Frame memory	Pixel count	1024×768, 1024×384, 1024×192, 1024×96
	For confocal image	12 bit
	For color image	8-bit for RGB each
	For height measurement	16 bit
Frame rate	Surface scan	20 Hz to 160 Hz
Frame rate	Line scan	~8 kHz
Auto function		Auto focus
Laser beam light source for confocal measurement	Wavelength	Violet laser, 405 nm
	Output	~2 mW
	Laser Class	Class 3b
Laser light-receiving element		PMT (photomultiplier tube)
Data processing unit		Dedicated PC
Power supply	Power-supply voltage	100 to 240 VAC, 50/60 Hz
Power supply	Current consumption	500 VA max.
Weight	Microscope	Approx. ~ 8 kg
Weight	Controller	~8 kg

Note 1 :
Fine scan is performed by piezoelectric actuator (PZT).
Dual scan mode by fine and long scanner is available only for single lens type.
Note 2 :
100 times measurement of standard sample (1μm step height) with 100× / 0.95 objective.
Note 3 :
100 times measurement of standard sample (5μm pitch) with 100× / 0.95 objective.

Dimensions