Model | Microsope | NS-3500 | Remark | ||||
---|---|---|---|---|---|---|---|
Controller | NS-3500E | ||||||
Objective lens magnification | 10× | 20× | 50× | 100× | 150× | ||
Observation / Measuring range |
Horizontal (H): μm | 1400 | 700 | 280 | 140 | 93 | |
Vertical (V): μm | 1050 | 525 | 210 | 105 | 70 | ||
Working distance: mm | 16.5 | 3.1 | 0.54 | 0.3 | 0.2 | ||
Numerical aperture (N.A.) | 0.30 | 0.46 | 0.80 | 0.95 | 0.95 | ||
Optical zoom | ×1 to ×6 | ||||||
Total magnification | 178× to 26700× | ||||||
Optical system for observation / measurement | Pinhole confocal optical system | ||||||
Height measurement | Measuring scan range | Fine scan : 100 μm (and/or) Long scan : 7 mm [NS-3800-L] | Note 1 | ||||
Fine scan : 400 μm (and/or) Long scan : 10 mm [NS-3800-D | |||||||
Fine scan : 200 μm (or) Long scan : 10 mm [NS-3800-T] | |||||||
Display resolution | 0.001 μm | ||||||
Repeatability σ | 0.010 μm | Note 2 | |||||
Width measurement | Display resolution | 0.001 μm | |||||
Repeatability 3σ | 0.02 μm | Note 3 | |||||
Frame memory | Pixel count | 1024×768, 1024×384, 1024×192, 1024×96 | |||||
For confocal image | 12 bit | ||||||
For color image | 8-bit for RGB each | ||||||
For height measurement | 16 bit | ||||||
Frame rate | Surface scan | 20 Hz to 160 Hz | |||||
Line scan | ~8 kHz | ||||||
Auto function | Auto focus | ||||||
Laser beam light source for confocal measurement |
Wavelength | Violet laser, 405 nm | |||||
Output | ~2 mW | ||||||
Laser Class | Class 3b | ||||||
Laser light-receiving element | PMT (photomultiplier tube) | ||||||
Data processing unit | Dedicated PC | ||||||
Power supply | Power-supply voltage | 100 to 240 VAC, 50/60 Hz | |||||
Current consumption | 500 VA max. | ||||||
Weight | Microscope | Approx. ~ 8 kg | |||||
Controller | ~8 kg |
Fine scan is performed by piezoelectric actuator (PZT).
Dual scan mode by fine and long scanner is available only for single lens type.
100 times measurement of standard sample (1μm step height) with 100× / 0.95 objective.
100 times measurement of standard sample (5μm pitch) with 100× / 0.95 objective.