NS-3500 is a high-speed confocal laser scanning microscope (CLSM) for precise and reliable 3-dimensional (3D) measurement. A real time confocal microscopic image is achieved by fast optical scanning modules and signal processing algorithms. It is a promising solution to measure and inspect the microscopic 3D structures such as semiconductor wafers, FPD products, MEMS devices, glass substrates, and material surfaces.
Operation software NSWorks
Analysis software NSViewer
Roughness measurement for selected ROI (region of interest)
For wide range inspection, the consecutive measurement and image tiling of pre-defined area is available with the motorized XY stage and NSMosaic, the image stitching software of NS-3500. The stitched image can be analyzed as one single measurement result.
NS-3500 is a promising solution for the measurement of height, width, angle, area, and volume of micro and submicro structures such as