산업용
컨포컬 모듈,
NS-38OO

빠르고 정확한 산업용 측정 모듈

NS-3800은 연구용 컨포컬 현미경 NS-3500을 산업용 측정 모듈로 최적화시켜 구현한 제품입니다. 컴팩트한 크기는 다양한 검사장비와의 장착이 용이하며, PZT(piezoelectric actuator)와 정밀 모터가 융합된 하이브리드 광축 스캐너는 빠르고 정확한 오토포커싱 기능과 함께 가장 신뢰할 수 있는 정확한 측정값을 제공합니다.

NS-3800의 간단한 설치 사례

사양

Model Microscope NS-3800 Remarks
Controller NS-3500E
Objective lens magnification 10X 20X 50X 100X 150X
Observation / Measuring range Horizontal (H) : µm 1400 700 280 140 93
Vertical (V) : µm 1050 525 201 105 70
Working distance : mm 16.5 3.1 0.54 0.3 0.2
Numerical aperture (N.A.) 0.30 0.46 0.80 0.95 0.95
Optical zoom ×1 to ×6
Total magnification 178× to 26700×
Optical system for observation / measurement Pinhole confocal optical system
Height measurement Measuring scan range Fine scan : 100 µm (and/or) Long scan : 7mm (NS-3800-L) Note1
Fine scan : 400 µm (or) Long scan : 10mm (NS-3800-D)
Fine scan : 200 µm (or) Long scan : 10mm (NS-3800-T)
Display resolution 0.010 µm
Repeatability 3σ 0.10µm Note2
Width measurement Display resolution 0.001 µm
Repeatability 3σ 0.02µm Note3
Frame memory Pixel count 1024×768, 1024×384, 1024×192, 1024×96
For confocal image 12bit
For color image 8-bit for RGB each
For height measurement 16bit
Frame rate Surface scan 20 Hz to 160 Hz
Line scan ~8 kHz
Auto function Auto gain, Auto focus
Laser beam light source for confocal measurement confocal measurement Wavelenghth Violet laser, 405 nm
Output -2mW
Laser Class Class 3b
Laser light-receiving clement PMT (photomultiplier tube)
Data processing unit Dedicated PC
Power supply Power-supply volatage 100 to 240 VAC, 50/60 Hz
Current consumption 500 VA max.
Weight Microscope Approx. ~ 8kg
Controller ~8 kg
Power supply Current consumption 500 VA max.
Isolation system Isolation system Active isolator Option

∙ Note 1: Fine scan is performed by piezoelectric actuator (PZT)
∙ Dual scan mode by fine and long scanner is available only for single lens type
∙ Note 2: 100 times measurement of standard sample (1µm step height) with 100× /0.95 objective
∙ Note 3: 100 times measurement of standard sample (5µm pitch) with 100× /0.95 objective

치수

갤러리

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